| 58492 |
Creator |
c3baa1aae2495d9fcf383c433b46bfe0 |
| 58492 |
Creator |
ext-8315a64407093db1a595c61830e066de |
| 58492 |
Date |
2018 |
| 58492 |
Date |
2019-02 |
| 58492 |
Is Part Of |
repository |
| 58492 |
Is Part Of |
p01413910 |
| 58492 |
abstract |
Fluoropolymer films are frequently used in microfabrication and for producing hydrophobic
and low-k dielectric layers in various applications. As the reliability of functional
coatings is becoming a more pressing issue in industry, it is necessary to determine
the physical stability and degradation properties of this important class of films.
To this end, a study has been undertaken to ascertain the aging characteristics of
fluoropolymer films under various environmental conditions that such a film may experience
during its use. In particular, fluorocarbon films formed by plasma-enhanced chemical
vapour deposition (PECVD) using octafluorocyclobutane, or c-C4F8, as a precursor gas
have been exposed to abrasive wear, elevated temperatures, ultraviolet radiation,
as well as oxygen plasma and SF6 plasma, the latter being commonly used in conjunction
with these films in ion etching processes. The results show that sub-micron thick
fluoropolymer films exhibit a significant amount of elastic recovery during nanoscratch
tests, minimising the impact of wear. The films exhibit stability when exposed to
365 nm UV light in air, but not 254 nm light in air, which generated significant decreases
in thickness. Exposure to temperatures up to 175 °C did not generate loss of material,
whereas temperatures higher than 175 °C did. Etching rates upon exposure to oxygen
and SF6 plasmas were also measured. |
| 58492 |
abstract |
Fluoropolymer films are frequently used in microfabrication and for producing hydrophobic
and low-k dielectric layers in various applications. As the reliability of functional
coatings is becoming a more pressing issue in industry, it is necessary to determine
the physical stability and degradation properties of this important class of films.
To this end, a study has been undertaken to ascertain the aging characteristics of
fluoropolymer films under various environmental conditions that such a film may experience
during its use. In particular, fluorocarbon films formed by plasma-enhanced chemical
vapour deposition (PECVD) using octafluorocyclobutane, or c-C<sub>4</sub>F<sub>8</sub>,
as a precursor gas have been exposed to abrasive wear, elevated temperatures, ultraviolet
radiation, as well as oxygen plasma and SF<sub>6</sub> plasma, the latter being commonly
used in conjunction with these films in ion etching processes. The results show that
sub-micron thick fluoropolymer films exhibit a significant amount of elastic recovery
during nanoscratch tests, minimising the impact of wear. The films exhibit stability
when exposed to 365 nm UV light in air, but not 254 nm light in air, which generated
significant decreases in thickness. Exposure to temperatures up to 175 °C did not
generate loss of material, whereas temperatures higher than 175 °C did. Etching rates
upon exposure to oxygen and SF<sub>6</sub> plasmas were also measured. |
| 58492 |
authorList |
authors |
| 58492 |
status |
peerReviewed |
| 58492 |
uri |
http://data.open.ac.uk/oro/document/746150 |
| 58492 |
uri |
http://data.open.ac.uk/oro/document/746151 |
| 58492 |
uri |
http://data.open.ac.uk/oro/document/746173 |
| 58492 |
uri |
http://data.open.ac.uk/oro/document/746174 |
| 58492 |
uri |
http://data.open.ac.uk/oro/document/746175 |
| 58492 |
uri |
http://data.open.ac.uk/oro/document/746176 |
| 58492 |
uri |
http://data.open.ac.uk/oro/document/746646 |
| 58492 |
volume |
160 |
| 58492 |
type |
AcademicArticle |
| 58492 |
type |
Article |
| 58492 |
label |
Bowen, James and Cheneler, David (2018). The stability and degradation of PECVD
fluoropolymer nanofilms. Polymer Degradation and Stability (Early Access). |
| 58492 |
label |
Bowen, James and Cheneler, David (2019). The stability and degradation of PECVD
fluoropolymer nanofilms. Polymer Degradation and Stability, 160 pp. 203–209.
|
| 58492 |
label |
Bowen, James and Cheneler, David (2019). The stability and degradation of PECVD
fluoropolymer nanofilms. Polymer Degradation and Stability, 160 pp. 203–209. |
| 58492 |
Title |
The stability and degradation of PECVD fluoropolymer nanofilms |
| 58492 |
in dataset |
oro |