| 55829 |
Creator |
c3baa1aae2495d9fcf383c433b46bfe0 |
| 55829 |
Creator |
ext-284b464541ca4ff4fca6a13bb197ba2f |
| 55829 |
Creator |
ext-70a7912bbd26bdcdfa44819ea86fbd3e |
| 55829 |
Creator |
ext-95117f4e7f1e519b2232ed21603e5508 |
| 55829 |
Creator |
ext-9d10a3b9fa0f45270bf4f530649a6051 |
| 55829 |
Date |
2018 |
| 55829 |
Is Part Of |
repository |
| 55829 |
Is Part Of |
pacde6a08204e7d0e9c3ccf3e99b8a9ab |
| 55829 |
abstract |
The reference cantilever method is shown to act as a direct and simple method for
determination of torsional spring constant. It has been applied to the characterization
of micropaddle structures similar to those proposed for resonant functionalized chemical
sensors and resonant thermal detectors. It is shown that this method can be used as
an effective procedure to characterize a key parameter of these devices and would
be applicable to characterization of other similar MEMS/NEMS devices such as micromirrors.
In this study, two sets of micropaddles are manufactured (beams at centre and offset
by 2.5 μm) by using LPCVD silicon nitride as a substrate. The patterning is made by
direct milling using focused ion beam. The torsional spring constant is achieved through
micromechanical analysis via atomic force microscopy. To obtain the gradient of force
curve, the area of the micropaddle is scanned and the behaviour of each pixel is investigated
through an automated developed code. The experimental results are in a good agreement
with theoretical results. |
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authorList |
authors |
| 55829 |
status |
peerReviewed |
| 55829 |
uri |
http://data.open.ac.uk/oro/document/656564 |
| 55829 |
uri |
http://data.open.ac.uk/oro/document/656565 |
| 55829 |
uri |
http://data.open.ac.uk/oro/document/656566 |
| 55829 |
uri |
http://data.open.ac.uk/oro/document/656567 |
| 55829 |
uri |
http://data.open.ac.uk/oro/document/656568 |
| 55829 |
uri |
http://data.open.ac.uk/oro/document/656569 |
| 55829 |
uri |
http://data.open.ac.uk/oro/document/815128 |
| 55829 |
uri |
http://data.open.ac.uk/oro/document/815142 |
| 55829 |
uri |
http://data.open.ac.uk/oro/document/815143 |
| 55829 |
uri |
http://data.open.ac.uk/oro/document/815144 |
| 55829 |
uri |
http://data.open.ac.uk/oro/document/815145 |
| 55829 |
uri |
http://data.open.ac.uk/oro/document/815146 |
| 55829 |
uri |
http://data.open.ac.uk/oro/document/815646 |
| 55829 |
uri |
http://data.open.ac.uk/oro/document/815824 |
| 55829 |
type |
AcademicArticle |
| 55829 |
type |
Article |
| 55829 |
label |
Mahmoodi, Nasim; Sabouri, Aydin; Bowen, James ; Anthony, Carl J and Mendes, Paula
M (2018). Mechanical characterization of torsional micro-paddles using atomic force
microscopy. Journal of Sensors, article no. 6160907. |
| 55829 |
label |
Mahmoodi, Nasim; Sabouri, Aydin; Bowen, James ; Anthony, Carl J and Mendes, Paula
M (2018). Mechanical characterization of torsional micro-paddles using atomic force
microscopy. Journal of Sensors, article no. 6160907. |
| 55829 |
Title |
Mechanical characterization of torsional micro-paddles using atomic force microscopy |
| 55829 |
in dataset |
oro |