| 43417 |
Creator |
c3baa1aae2495d9fcf383c433b46bfe0 |
| 43417 |
Creator |
ext-d532ef4efde399b1612cf4b4e51ec8a6 |
| 43417 |
Creator |
ext-17b037783f7fc51a9ff63ebf9912ad34 |
| 43417 |
Creator |
ext-f89e37745a94fd703ebb1018d884bedf |
| 43417 |
Date |
2011-04-25 |
| 43417 |
Is Part Of |
repository |
| 43417 |
abstract |
The fabrication and characterization of released cantilevers in new multilayer thin
films architectures is reported. In contrast to previous works, the cantilevers are
produced without etching of the substrate and are based on lead free piezoelectric
materials. The three architectures are: SrRuO<sub>3</sub>/BaTiO<sub>3</sub>/MgO/SrTiO<sub>3</sub>/YBa<sub>2</sub>Cu<sub>3</sub>O<sub>7</sub>,
SrRuO<sub>3</sub>/BaTiO<sub>3</sub>/SrRuO<sub>3</sub>/YBa<sub>2</sub>Cu<sub>3</sub>O<sub>7</sub>
and SrRuO<sub>3</sub>/BaTiO<sub>3</sub>/SrRuO<sub>3</sub>/SrTiO<sub>3</sub>/YBa<sub>2</sub>Cu<sub>3</sub>O<sub>7</sub>.
It is shown that the different architectures allow a choice of the orientation of
the polar axis in piezoelectric layers, in plane (d33 mode) or out of plane (d31 mode).
Both configurations may be utilized in piezoelectric energy harvesting devices. Released
cantilevers with the above layer sequences have been produced with lengths ranging
from, 100 μm to 250 μm. The residual stress after the release of the cantilevers produces
an upwards bending, the distance between the cantilever tips and the substrate varying
between 20 μm and 45 μm. This distance would allow the sufficient vibration amplitude
to enable the cantilevers to be used as micro-generators. Measurements of Young Modulus
of the cantilevers and of polarization hysteresis loop are reported. |
| 43417 |
authorList |
authors |
| 43417 |
editorList |
editors |
| 43417 |
presentedAt |
ext-07c40908ad630d3a7f75a4e322dc7f0c |
| 43417 |
status |
nonPeerReviewed |
| 43417 |
volume |
1325 |
| 43417 |
type |
AcademicArticle |
| 43417 |
type |
Article |
| 43417 |
label |
Vasta, Giuseppe; Jackson, Tim J.; Bowen, James and Tarte, Edward J. (2011). New
multilayer architectures for piezoelectric BaTiO3 cantilever systems. In: 2011 Materials
Research Society Spring Meeting (Venkatasubramanian, R.; Radousky, H. and Liang, H.
eds.), 25-29 Apr 2011, San Francisco, UK. |
| 43417 |
label |
Vasta, Giuseppe; Jackson, Tim J.; Bowen, James and Tarte, Edward J. (2011). New
multilayer architectures for piezoelectric BaTiO3 cantilever systems. In: 2011 Materials
Research Society Spring Meeting (Venkatasubramanian, R.; Radousky, H. and Liang, H.
eds.), 25-29 Apr 2011, San Francisco, UK. |
| 43417 |
Title |
New multilayer architectures for piezoelectric BaTiO<sub>3</sub> cantilever systems |
| 43417 |
in dataset |
oro |