| 43382 |
Creator |
c3baa1aae2495d9fcf383c433b46bfe0 |
| 43382 |
Creator |
ext-37b7e4f0a590d4c58330f5542fb2a550 |
| 43382 |
Creator |
ext-0a4a9c4e210e610c7f2f76ba80f8afab |
| 43382 |
Creator |
ext-26156646cfd72eab81b9b4c6477eeffd |
| 43382 |
Creator |
ext-5a5177f7bf239b0fd6c768cfc999cc63 |
| 43382 |
Date |
2014-09-22 |
| 43382 |
Is Part Of |
repository |
| 43382 |
abstract |
MEMS technologies have been integrated into numerous applications due to their sensitivity,
miniature size and low cost for batch production. Strain sensing is one application
and Double Ended Tuning Fork (DETF) MEMS resonant sensors exhibit excellent performance
in the precision measurement of strain due to their high sensitivity. The conventional
actuation and read-out method for DETF is to actuate the tuning fork with one electrode
through an AC voltage; as the tines are coupled, the other tine will be excited as
well and produce an alternating current on the other electrode. Any applied strain
on the tine of DETF results in the frequency shift.
In this study we use FIB in order to make a high resolution mask for fabricating DETF
structures which do not cause damage to the resonator, leading to having a higher
Quality Factor. Fabrication of DETFs using this process eliminates the need to use
any costly glass mask, provides flexibility in changing the dimensions and offers
a fast process. |
| 43382 |
authorList |
authors |
| 43382 |
presentedAt |
ext-97bb53a55a7e855196d791bd19f9a743 |
| 43382 |
status |
nonPeerReviewed |
| 43382 |
type |
AcademicArticle |
| 43382 |
type |
Article |
| 43382 |
label |
Mahmoodi, Nasim; Sabouri, Aydin; Anthony, Carl J.; Bowen, James and Mendes, Paula
M. (2014). Fabrication of double ended tuning fork using ALD Al2O3 as a hard mask.
In: 40th International Conference on Micro & Nano Engineering, 22-26 Sep 2014, Lausanne,
Switzerland. |
| 43382 |
label |
Mahmoodi, Nasim; Sabouri, Aydin; Anthony, Carl J.; Bowen, James and Mendes, Paula
M. (2014). Fabrication of double ended tuning fork using ALD Al2O3 as a hard mask.
In: 40th International Conference on Micro & Nano Engineering, 22-26 Sep 2014, Lausanne,
Switzerland. |
| 43382 |
Title |
Fabrication of double ended tuning fork using ALD Al2O3 as a hard mask |
| 43382 |
in dataset |
oro |